厚度線上即時檢測之光學干涉裝置及其方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

103101988

專利證號

I 486550

專利獲證名稱

厚度線上即時檢測之光學干涉裝置及其方法

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2015/06/01

技術說明

一種厚度線上即時檢測之光學干涉裝置，可同時符合快速線上檢測之量測時間短及範圍大等要求，對待測試件以非接觸及非破壞性方式進行量測，量測方式係使光波以斜向角度照射，其干涉條紋直接與待測試件之厚度相關，無需使用透鏡，不僅成本較低，更可有較大的量測區域，且相位差在同一橫斷面上會自近光源側至他側由左而右呈現連續單調（monotonic）遞減函數之分布，根據此固定規律性可有效地進行相位展開，無需經過相移（Phase Shift），可使本發明達成快速線上檢測之目標；因此，本發明係提供一種光徑（Optical Path）不需光學透鏡組之技術，利用高同調性（Coherence）點擴束之球面光波以斜向角度照射待測試件進行瞬時且大範圍面積之全場厚度量測，故適用於即時線上檢測。 An optical interferometry based on-line real-time thickness measurement apparatus is provided. The apparatus can fulfill the requirement of short time and large area for the on-line and real-time inspection. The thickness of the test object is measured in a non-contact and non-destructive way. To perform the thickness measurement, an expanded light is projected with oblique angle onto the test object. The interference fringes thus formed is directly related to the thickness of the test object. No lens between light source and test object is needed for light manipulation. Furthermore, not only the cost is lower but also the measurement area is larger. The phase difference in the same cross section shows monotonic decreasing fashion from the side closer to the light source to the opposite side, said from left to right. According to the regularity of phase change, the phase difference is effectively unwrapped without phase shift.

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